SUPER
POLISHING

SUBSTRATES

•   Superpolished

•   Ø 5 - 200 mm

•   Materials: FS, BK7, Zerodur, ...

•   Plano surfaces

•   Radius surfaces ROC > 1000 mm

•   In development: ROC < 1000 mm

•   Diaphragm & custom-shaped

•   Typical roughness < 0.6 Å (rms)

RESONATOR BLOCKS

•   Superpolished or laser grade finish

•   Dimensions up to 150 mm

•   Materials: FS, BK7, Zerodur, ...

•   Custom shaped internal structures

•   High accurate angles

•   Etched inner surfaces

•   Typical angle tolerance < 2 arcsec

APPLICATIONS

•   Ring-laser gyroscopes

•   High-Finesse external cavities (F > 100‘000)

•   High reflective laser mirrors

•   Brewster Windows

•   Low loss coated components

•   In development: Laser crystals

•   Typ. R > 99.999%

ROUGHNESS:
Zygo NewView 6300

•   White light interferometer

•   FOV 0.7 mm x 0.5 mm

•   Roughness < 0.6 Å (rms)

SCATTER
"Streuli"

•   Low scattering device 

•   FOV 1 mm x 1 mm

•   Integrated scatter < 5 ppm @ 633 nm

•   Integrated scatter < 10 ppm with a yield of > 95%

ANGLE:

Möller-Wedel A-HR

•   Goniometer

•   Parallelism < 1 arcsec

•   Angle < 1 arcsec

•   Resolution 0.4 arcsec

SURFACE FLATNESS:

Zygo GPI XP-D

•   Laser based phase shifting interferometer

•   Measurement area up to Ø 150 mm

•   Surface figure < λ / 20

CLEANLINESS AND TEXTURE:

Olympus Lext 4100

•   Laser scanning digital microscope 

•   Non-contacting 3D observations & measurements

•   10 nm resolution (vertically)

•   Total magnification 108x - 17280x

FREEFORM SHAPE:

Hexagon Optiv 443

•   Contact-less and tactile measurement procedures

•   Robust 3D multisensor metrology

•   400 x 400 x 300 mm XYZ measuring range

•   Accuracy XYZ ≤ 1.9 + 5L/1000 (µm)